介观压阻效应微陀螺仪的制造问题及改进方法  

Problems and Improved Methods in the Fabrication of Meso-Piezoresistive Effect Micro-Gyroscope

作　　者：李孟委[1] 杜康[1] 刘俊[1] 王勇[2] 石云波[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051 [2]中国电子科技集团第13研究所,河北石家庄050051

出　　处：《中北大学学报（自然科学版）》2009年第6期624-629,共6页Journal of North University of China(Natural Science Edition)

基　　金：国家自然基金资助项目(50675212)

摘　　要：将利用多势垒纳米膜介观压阻效应的高灵敏度器件应用在陀螺中,提出了介观压阻效应微陀螺仪结构,并论述了其工作原理.研究并开发了多势垒纳米膜及介观压阻效应微陀螺仪的制造工艺,通过对制造后的结构进行测试,发现了制造过程中的缺陷,包括敏感结构多势垒纳米膜制造缺陷、陀螺检测梁和驱动梁制造缺陷、检测信号电磁干扰缺陷和封装缺陷等.分析论述了形成缺陷的原因,提出了克服这些问题的工艺方法,从而改进了隧穿微机械陀螺仪的制造工艺,有利于提高微陀螺的制造成品率.High-sensitivity device based on meso-piezoresistive effect of multi-barrier nano films was used to micro-machined gyroscope.The structure of such micro-machined gyroscope was proposed and its operation principle was also discussed.The fabrication processes of this gyroscope were developed and designed.Through the measurement of structure,some deficiencies in the fabrication processes were found,including the mutil-barrier nano film manufacturing defects,the detection beam and drive beam manufacturing defects,the detects of electromagnetic signal interference defects and package defects etc.The problems in manufacturing process were analyzed,the reasons for the formation of defects were summarized and the approaches to solve these problems were proposed.The fabrication processes of resonant tunneling micro-machined gyroscope are improved and the production yield is increased.

关 键 词：隧穿微陀螺仪 多势垒纳米膜 介观压阻效应 制造工艺 缺陷 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]