高技术设备随机微振动环境评价指标  

Generic Criterion for Random Micro-Vibration of High-Tech Precision Facilities

作　　者：张巍[1] 应祖光[2] 

机构地区：[1]浙江理工大学经济管理学院,杭州310018 [2]浙江大学航空航天学院,杭州310027

出　　处：《噪声与振动控制》2010年第1期112-113,126,共3页Noise and Vibration Control

基　　金：浙江省自然科学基金资助项目(Y607087);浙江理工大学教育教学改革重点项目(ZD0813)

摘　　要：首先,简述高技术领域微振动环境评价指标的意义,介绍随机微振动环境的均方根速度评价指标,它不同于普通振动的位移与加速度,综合地描述了随机扰动的统计特性与中心频率效应。然后,按照不同振动敏感性与要求,将扰动环境划分为五类,给出相应的均方根速度上限及其频谱。最后,通过一个环境速度扰动的例子说明评价指标的应用。The generic criterion for random micro-vibrations has a significant application in high- tech field, such as vibration-sensitive precision facilities. First of all, the mean-square-root velocity of random micro- vibration is introduced as a criterion. Different from the usual displacement and acceleration of vibration, this criterion describes both the statistical characteristics and centre-frequency effects of random disturbances. Then five micro-vibration levels are defined for disturbing environment according to various vibration sensitivities and requirements. And the corresponding up-limits and frequency spectrums of the mean-square-root velocities are given. Finally, application of the criterion, the mean-square-root velocity, is illustrated through an example of disturbing environment.

关 键 词：振动与波 微振动 评价指标 均方根速度 评价曲线 

分 类 号：TP273.2[自动化与计算机技术—检测技术与自动化装置] X22[自动化与计算机技术—控制科学与工程]