一种基于MEMS光栅光调制器的近红外光谱探测系统  

A Novel Near-Infrared Spectra Detection System Based on MEMS Grating Light Modulators

作　　者：韦玮[1] 黄尚廉[1] 陈伟民[1] 王宁[1] 张洁[1] 朱永[1] 

机构地区：[1]重庆大学光电工程学院,光电技术及系统教育部重点实验室,重庆400044

出　　处：《光谱学与光谱分析》2010年第3期846-850,共5页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(60708017);重庆市院士基金项目(CSTC,2008BC3002)资助

摘　　要：基于微机电系统技术的近红外光谱探测系统已成为了近红外光谱仪研究的一个新方向。文章提出了一种基于光栅光调制器的新型近红外光谱探测系统。该系统采用微加工技术制造的光栅光调制器阵列与单点近红外探测器相结合使用的方法进行光谱探测。设计了该光谱探测系统的光学结构,论述了系统光谱探测原理,并使用经表面微加工工艺得到的光栅光调制器器件进行了系统分辨本领、波长准确性、系统稳定性、器件响应频率等特征参数测试实验。结果表明,该探测系统在1 320到1 400 nm波长范围内,分辨本领小于10 nm,波长准确性小于1 nm,系统稳定性小于0.5%,光栅光调制器的响应频率为5kHz。实验结果证明了该近红外光谱探测系统的可行性,为研制基于微机电系统光栅光调制器的微型化近红外光谱仪提供了理论基础及实验指导。A novel near-infrared spectrum detection system based on grating light modulators is proposed in the present paper. A new spectrum detection method that combines MEMS grating light modulators with a single near infrared detector is applied in the system, which can avoid using costly near infrared detector array. Firstly, the optical structure of the spectra detection system was designed. Secondly, the spectra detection principle of this system was addressed in detail that with a series of voltages actuated on the grating hght modulators array, the optical energy of each wavelength is reflected onto the single near-infrared detector by corresponding grating light modulator pixel orderly and the transmission spectra can be acquired after a scanning period. Finally, the grating light modulators array device was fabricated by surface micromachining processing and a near-infrared spectra detection system was set up to test the key parameters such as resolving power, wavelength accuracy, system stability and response characteristics of grating light modulators. The experimental results illuminated that the spectrum range of this spectra detection system is from 1 320 to 1 400 nm, the resolving power is below 10nm, the wavelength accuracy is within lnm, the stability of the system is below 0. 5 % and the response frequency is 5 kHz. The results of theory analysis and experiments demonstrated the feasibility of the spectra detection system. It could give theoretical and experimental guidance to the design and fabrication of miniature near-infrared spectrometer based on grating light modulators.

关 键 词：近红外 光谱探测系统 光栅光调制器 微机电系统 

分 类 号：TH744.1[机械工程—光学工程]