多集束型装备调度的k晶圆周期序列问题  

K wafer cycle sequence problem in multi-cluster tools scheduling

作　　者：李林瑛[1,2] 胡静涛[1] 

机构地区：[1]中国科学院沈阳自动化研究所工业信息学重点实验室,辽宁沈阳110016 [2]中国科学院研究生院,北京100039

出　　处：《计算机集成制造系统》2010年第1期109-114,126,共7页Computer Integrated Manufacturing Systems

基　　金：沈阳市科技计划资助项目(108155-02-00)~~

摘　　要：为解决机械手活动序列和产能分析这一半导体制造业多集束型装备调度的关键问题,研究了一类通用的多集束型装备机械手调度中的k晶圆周期序列问题,证明了k晶圆周期序列的平均周期下界。提出了一种构造k晶圆周期序列的策略和实现该策略的构造算法,并根据构造算法推导出了平均周期的表达式。最后,通过仿真数据和国内某Track机厂商的真实数据验证了该策略的优越性和实用性。To deal with the activity sequence of robot and the throughout analysis which were crucial for multi-cluster tools scheduling in semiconductor manufacturing,the k wafer cycle sequence problem in multi-cluster tools scheduling was studied.The lower bound of per wafer cycle time for k wafer cycle sequence was proved.The policy of k wafer cycle sequence and its construction algorithm were proposed,and the expression of per wafer cycle time was derived by the proposed algorithm.Finally,the superiority and the practical value of the mentioned policy were validated by the simulation results and the practical data from a Chinese Track manufacturing company.

关 键 词：半导体制造 多集束型装备 双臂机械手 缓冲加工模块 并行机 调度 

分 类 号：TP241.2[自动化与计算机技术—检测技术与自动化装置] TP278[自动化与计算机技术—控制科学与工程]