微泵膜片在静电驱动下的计算机模拟  

Computer Simulation of Micropump Membrane under Electrostatic Drive

作　　者：刘晓为[1] 车伟 王蔚[1] 李新 刘玉强 刘振茂[1] 范茂军 

机构地区：[1]哈尔滨工业大学航天学院,150001 [2]东北传感器研究所

出　　处：《哈尔滨工业大学学报》1998年第6期16-18,25,共4页Journal of Harbin Institute of Technology

基　　金：国家教委留学人员回国基金

摘　　要：对微泵膜片在静电力驱动下产生的形变和由此引起的微泵腔体体积的变化进行了计算机模拟分析，得出了膜片厚度、形状和静电驱动电压对微泵胶体体积变化的影响，以及膜片振动的固有频率与膜片厚度之间的关系．研究结果为微泵结构的设计优化提供了依据．In this paper， the deformation of the micropump membrane and the volume change of the micropumpchamber under electrostatic drive were simulated by finite element method（FEM）．The effects of the membranethickness， shape and electrostatic voltage on the volume change of membrane were analyzed． The relation betweenthe inhere frequency and membrane thickness was also discussed． The computer simulation results can be used tooptimizing the structure design of mcropumps.

关 键 词：微泵 膜片 有限元 静电力 计算机模拟 

分 类 号：TP211.3[自动化与计算机技术—检测技术与自动化装置]