镜面面型误差的曲面方程处理方法  

Treating with Surface Figure Error of Mirror/Lens by Means of Surface Equation

作　　者：吴清文[1] 

机构地区：[1]中国科学院长春光学精密机械研究所

出　　处：《光学精密工程》1998年第6期56-60,共5页Optics and Precision Engineering

摘　　要：在论述Ｚｅｒｎｉｋｅ多项式的优缺点的基础上，提出用曲面方程处理方法来处理镜面面型。最后，讨论了曲面方程法的适应性和局限性。The advantage and disadvantage of Zernike polynomials is stated, and an approach to treating with the surface figure error of mirror/lens by means of surface equation is presented. The advantage and limitation of the method is discussed.

关 键 词：面型 最小二乘法 均方根 光学镜面 误差处理 

分 类 号：TB851.02[一般工业技术—摄影技术]