溶胶-凝胶法在石英基片上制备氧化锌薄膜  

Zinc Oxide Thin Films Prepared by Sol-Gel Method on Quartz Substrates

作　　者：饶军[1] 庄彬平[1] 林丽梅[1] 瞿燕[1] 赖发春[1] 

机构地区：[1]福建师范大学物理与光电信息科技学院,福建福州350007

出　　处：《福建师大福清分校学报》2009年第B12期68-70,共3页Journal of Fuqing Branch of Fujian Normal University

基　　金：福建省自然科学基金资助项目(2007J0317);福建师范大学本科生课外科技计划项目(BKL2008-012)

摘　　要：氧化锌是一种宽禁带的半导体材料,它在太阳能电池、气体传感器等各种光电子器件中有广泛的应用前景。本文用溶胶-凝胶法制备ZnO溶胶,再甩膜在石英基片上,最后经微波加热而获得ZnO薄膜。分别用原子力显微镜、分光光度计和荧光谱仪研究不同厚度薄膜的表面形貌和光学性质。实验结果表明:制备薄膜随着薄膜厚度的增加,薄膜的生长模式由层状生长向岛状生长转变;所有薄膜在可见光范围内的透射率都超过65%;样品发光特性良好。ZnO has been widely used in many optoelectronic devices such as solar cells and gas sensors,because it is a semiconductor material with a wide energy band gap. In this paper,ZnO films were fabricated by sol -gel method. Films were spin -coating on quartz substrates and heated by microwave. Surface morphology and optical properties of the films were studied by atomic force microscopy,spectrophotometer and photoluminescence （PL）,respectively. The experimental results show that the film growth model changes from layer-grow to island-grow,and transmittance of all films is more than 65% in visible spectral region. The PL spectra show that the films have a high quality of luminescence.

关 键 词：氧化锌薄膜 溶胶-凝胶 微波加热 表面形貌 光学性质 

分 类 号：O484.1[理学—固体物理]