折叠梁刚度的误差灵敏度分析  

Error sensitivity analysis of folded beam stiffness

作　　者：周吴[1,2] 何晓平[2] 苏伟[2] 李柏林[1] 陈黎丽[1] 

机构地区：[1]西南交通大学机械工程学院,四川成都610031 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《机械设计》2010年第2期80-83,共4页Journal of Machine Design

基　　金：国防预研资助项目

摘　　要：对MEMS中并联或串联组合而成的两种折叠梁形式的总刚度进行了分析,分析了两种梁在总刚度相同的条件下对加工误差的灵敏度,指出在加工误差不可避免的情况下,选择合适的折叠梁结构来满足具体的运用要求。得出:除发生误差的情况之外,折叠梁对误差的灵敏度比单梁小得多。运用CoventorWave软件对梁结构在随机相对误差下进行了有限元仿真分析,验证了理论分析的正确性。The total stiffness of two typed folded beams formed by the parallel and series combination in the micro electro-mechanical system （MEMS） was analyzed, and the sensitivity of machining error was analyzed on these two kinds of folded beam structures under the condition of same total stiffness. It has been pointed out that under the circumstances of inevitable machining errors by choosing the appropriate folded beam structure to satisfy the concrete application requirements. It has been obtained that the sensitivity of error of folded beams was much smaller than that of single beams. The finite element simulation analysis was carried out on the beam structure under the random relative error by using the CoventorWave software, and the correctness of theoretical analysis was validated.

关 键 词：折叠梁 误差 相对误差 灵敏度 微结构 

分 类 号：TH12[机械工程—机械设计及理论] TH82