基于MEMS技术的微型阀研究  

Investigation of microvalve based on microelectromechanical systems

作　　者：张晰哲[1] 唐周强[1] 韩先伟[1] 管海兵[2] 宦飞[2] 

机构地区：[1]西安航天动力研究所,陕西西安710100 [2]上海交通大学信息安全工程学院,上海200041

出　　处：《火箭推进》2010年第1期8-12,共5页Journal of Rocket Propulsion

基　　金：国际科技合作项目(20070806)

摘　　要：根据微机电系统(MEMS)技术和微型阀技术的研究现状与发展趋势,在微型阀致动机理分析和性能对比的基础上,通过对微型阀结构的理论计算和数值模拟,论证了静电致动和压电致动两种微型阀方案,确定了微推进系统用微型阀的主要技术参数和性能指标;通过结构设计和MEMS工艺攻关,完成了基于MEMS技术的压电致动微型阀原理样件制造,并进行了初步的原理试验验证和性能检测。结果表明,基于MEMS技术的压电致动微型阀原理可行,方案合理;通过进一步的结构优化,解决多层键合和系统封装工艺,可以获得高性能的微型阀,为小型、轻质和集成化微推进系统研制奠定基础。According to the status and development trend of MEMS and microvavle technology, the concepts of staticelectricity and piezoelectricity microvavle have been demonstrated by the theoretical analyzing and numerical simulation based on the actuating analysis and performance comparison of the microvalve. The major technical and performance parameters have been determined. The prototype of the piezoelectricity microvalve was fabricated followed the structure design and MEMS technics research. Performance of the prototype has been tested. The result shows that the design of the MEMS piezoelectricity microvalve is reasonable, and the microvalve with high performance would be obtained through fabrication optimization and MEMS technics study.

关 键 词：微机电系统 微推进系统 静电微型阀 压电微型阀 

分 类 号：V432[航空宇航科学与技术—航空宇航推进理论与工程]