金属氧化物气敏元件的研究进展  

Research of Mental Oxide Gas Senor

作　　者：申小丹[1] 程东明[1] 吴京京[1] 杨光鲲[1] 

机构地区：[1]桂林电子科技大学机电工程学院,广西桂林541004

出　　处：《电子与封装》2010年第3期23-26,31,共5页Electronics & Packaging

摘　　要：气敏传感器在现代工农业、信息技术、环境监测等领域都有重要应用。随着这几个领域的发展,人类对其综合性能要求越来越强,进而不断积极改良气敏传感器的性能。金属氧化物气敏元件是利用金属氧化物半导体的表面电阻遇到被测气体发生变化的原理制成的电子器件,其选择性和稳定性是研究气敏元件的两项重要指标。文章概述了金属氧化物元件气敏特性的研究进展,介绍了基体材料、掺杂材料、气敏材料的制备工艺、电极材料及结构等几个因素对元件气敏特性的主要影响,并对各种因素的作用机理进行了分析。最后展望了金属氧化物气敏元件的发展前景。Gas sensors has important applications in modem industry, agriculture, information technology, environmental monitoring and other fields, the human has been actively improving the performance of gas sensors With these developments and strong comprehensive performance requirements in the fields.Metal oxide gas sensor is the electronic devices of metal oxide semiconductor surface resistance changing obviously when meeting measured gases, and its selectivity and stability is two important indicators of studying the gas component. This paper summarizes the research element of characteristics of metal oxide gas sensor, and introduces the matrix material, doped material, sensitive material preparation process, the electrode material and structure of several factor＇s main effect on the components of gas-sensing properties,and mechanism of action of various factors are analyzed. Finally, the future of metal oxide gas sensor development are prospected.

关 键 词：金属氧化物 气敏元件 选择性 稳定性 

分 类 号：TN306[电子电信—物理电子学]