微静电陀螺仪再平衡回路设计  

Design of rebalance loop for an electrostatically suspended micromachined gyroscope

作　　者：韩丰田[1] 付中泽 

机构地区：[1]清华大学精密仪器及机械学系,北京100084 [2]驻天津地区军代表室,天津300131

出　　处：《中国惯性技术学报》2010年第1期97-100,共4页Journal of Chinese Inertial Technology

基　　金：国家863计划资助项目(2008AA04Z312)

摘　　要：微静电陀螺仪依靠可控的静电力,将高速旋转的陀螺转子稳定地悬浮在高真空的电极腔中心,是一种能实现两自由度角速率测量的新型微机电陀螺。针对大角度、高角速率的捷联式惯性导航系统应用,对陀螺仪再平衡回路进行了设计。讨论了陀螺仪的动力学特性,给出了补偿负刚度特性的方法,采用双频波特图对系统稳定性进行了分析,给出了再平衡回路的性能仿真结果。仿真与分析表明,陀螺仪允许的最大输入角速度为768(°)/s,标度系数为6.44mV/((°)·s-1)。Abstract： The rotor of an electrostatically suspended micromachined gyroscope is suspended in a vacuum electrode-cavity by controlled electrostatic force and spinning with ultra-high speed. This new design gyroscope can operate as a dual-axis angular rate sensor. In this paper, we present the design and simulation of a rebalance loop for the gyroscope to be used in strapdown inertial navigation application with large dynamic range and high input angular rate. The dynamics of the gyroscope and the scheme to compensate for the unstable position stiffness inherent in electrostatic suspension are derived. Then the stability analysis based on dual-frequency Bode diagram is presented together with system response simulation in order to evaluate the performance of the rebalance loop. The analyzing and simulation results show that the allowable angular rate up to 768 （°）/s and the scale factor of 6.44 mV/（（°）·s^-1） can be reached.

关 键 词：微机械陀螺 静电悬浮 再平衡回路 稳定性 

分 类 号：U666.1[交通运输工程—船舶及航道工程]