波长扫描光纤干涉仪扫描模型的建立及分析  

ESTABLISHMENT AND ANALYSIS OF SCANNING MODEL OF A WAVELENGTH SCANNING FIBER OPTIC INTERFEROMETER

作　　者：王勇[1,2] 廖延彪[1,2] 田芊[1,2] 

机构地区：[1]清华大学电子工程系 [2]清华大学精密仪器系

出　　处：《红外与毫米波学报》1998年第6期459-464,共6页Journal of Infrared and Millimeter Waves

摘　　要：介绍了一种新的可用于绝对距离测量的波长扫描光纤干涉仪，建立了测量系统及波长扫描的模型，分析了波长扫描的随机漂移对测量的影响，提出了对光源扫描性能的要求．实验结果表明，测量系统的精度可达到０．０５μｍ．A new wavelength scanning fiber optic interferometer for absolute distance measurement was proposed. The measurement system and scanning model were put forward. Based on these models, the influence on distance measurement of the random drift of the source wavelength was analyzed. The demands for the source were proposed.The measurement precision of 0.05μm was obtained in this experiment.

关 键 词：光纤干涉仪 波长扫描 距离 扫描模型 干涉仪 

分 类 号：TH744.301[机械工程—光学工程]