传输矩阵法研究薄膜体声波谐振器  

Research of thin film bulk acoustic resonators (FBAR) using transmission matrix method

作　　者：张涛[1] 马宏伟[2] 郭长立[1] 张永元[1] 杨华平[1] 

机构地区：[1]西安科技大学理学院,陕西西安710054 [2]西安科技大学机械工程学院,陕西西安710054

出　　处：《西安科技大学学报》2010年第2期251-254,共4页Journal of Xi’an University of Science and Technology

基　　金：国家自然科学基金资助项目(50674075;10774074);陕西省自然科学基金资助项目(2009JQ1005)

摘　　要：薄膜体声波谐振器(FBAR)以其工作频率高、体积小、便于集成和低插损等优良特性而得到广泛应用,对薄膜体声波器件理论设计与优化的研究成为研究热点。本文引入传输矩阵法研究薄膜体声波谐振器,利用该方法推导薄膜体声波谐振器的输入阻抗公式,并利用该公式研究了A l/A lN/A l结构的FBAR的谐振频率、有效机电耦合系数和谐振品质因数。结果证明,该阻抗公式可有效的用来设计或评价FBAR的谐振频率、有效机电耦合系数和谐振品质因数等重要参数。The Thin Film Bulk Acoustic Resonators （FBAR） are novel resonators with the high frequency, small dimensions, low insert loss and available integrations, and they are widely used, in which the fabrications and theoretical optimizations of FBAR attract the attentions in acoustic resonators. The transmission matrix method is introduced for the research of FBAR in this paper, and the input imped- ance equation is obtained by this method. The FBARs with A1/AIN/AI structure are studied with this e- quation, and the resonance curves are given. By the impedance equation, it＇s accurate and available to characterize the important parameters of FBAR, such as the resonance frequencies, effective electromechanical coupling coefficients and resonance quality factors.

关 键 词：传输矩阵 FBAR 阻抗 谐振频率 谐振品质因数 

分 类 号：O421.2[理学—声学]