基于高精度位移传感器的减振平台  

Vibration isolation platform base on high accurate displacement sensors

作　　者：宁大勇[1,2] 高云国[1] 刘稀凤[3] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039 [3]大连教育学院,辽宁大连116021

出　　处：《光学精密工程》2010年第3期646-652,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2006AA04Z367)

摘　　要：为了保证光学精密仪器工作基础的高稳定性,设计了一种新型的减振平台。该减振平台采用精度为10nm的位移传感器作为测量装置,通过位移传感器测量隔振平台支撑弹簧的长度变化,计算出支撑力的变化;然后,调整电磁驱动器的电磁力,使光学精密仪器受力平衡,达到减振的目的。理论及仿真分析表明,采用这种减振方式有很好的减振效果。同时,由于每级减振装置之间是彼此独立的,这种减振方式更有利于多级减振。实验结果显示,基座振幅为0.22mm时,减振台支撑面振幅为1.6μm;基座振幅为0.20mm时,减振台支撑面振幅为1.4μm;基座振幅0.18mm时,减振台支撑面振幅为1.2μm;基座振幅为0.15mm时,减振台支撑面振幅为1.0μm,表明该平台有效地起到了减振作用。A vibration isolation platform is designed for keeping the precise optical instrument to work accurately. By taking displacement sensors with an accuracy of 10 nm as measuring devices, the platform calculates the changed force of the supporting spring by measuring the length change of the spring with the displacement sensor, then it adjusts the force of electromagnet actuator according to the changed force of spring to balance the precise optical instrument to isolate the vibration of base. According to the analysis of theory and simulation, it can satisfy the request of vibration isolation. Furthermore,this method is propitious to the multilevel reduce vibration, for each vibration isolation platform is independent. Experimental results indicate that when the vibration amplitudes of foundation are 0. 22,0. 20,0.18 and 0.15 mam, the vibration amplitudes of isolation vibration platform is 1.6, 1.4,1.2 and 1.0 μm, respectively, which shows proposed method can satisfy the requirement of isola- tion vibration.

关 键 词：位移传感器 减振平台 弹簧 电磁驱动器 

分 类 号：TH161.6[机械工程—机械制造及自动化] TP212.12[自动化与计算机技术—检测技术与自动化装置]