非球面非零位拼接测量的对准误差模型  

Alignment error for aspheric surfaces monnull stitching testing

作　　者：王伟波[1] 谭久彬[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150001

出　　处：《光电子．激光》2010年第2期240-244,共5页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(50675052)

摘　　要：为消除非零位拼接检测非球面中对准误差对拼接结果的影响,建立了基于对准误差修正的优化拼接模型;在非零位检测非球面对准误差模型的基础上,分析对准误差各误差分量的表现形式及影响规律,并建立了基于对准误差补偿的拼接检测非球面的数学模型,实现子孔径的高精度拼接合成。实验表明,该方法可以有效地提高拼接测量精度,经过对准误差校正的拼接测量结果的PV值精度可达0.03λ。The alignment error model is established to eliminate the influence of alignment error on sub- aperture stitching test for aspheric surface. The characteristics and effects of alignment error on the testing results are analyzed based on the alignment error model. So the stitching model with the alignment error compensation is proposed for aspheric surface non-null testing. Simulations and experiments are given to verify the validity and precision of the proposed algorithm. The result shows that the proposed method with alignment error compensation is quite efficient to improve the stitching accuracy, and the calibration precision of PV is up to 0. 03λ.

关 键 词：非球面 非零位检测 子孔径拼接 对准误差 

分 类 号：TH703[机械工程—仪器科学与技术] TH741[机械工程—精密仪器及机械]