脉冲激光沉积类金刚石膜时碳发射谱的时间分辨特性  

Time-Resolved Spectral Characteristics of Carbon Emission for Diamond-Like Film Prepared by Pulsed Laser Deposition

作　　者：林晓东[1] 胡居广[1] 刘毅[1] 张磊[2] 

机构地区：[1]深圳大学物理科学与技术学院,广东深圳518060 [2]广东药学院基础学院,广东广州510006

出　　处：《中国激光》2010年第3期815-818,共4页Chinese Journal of Lasers

基　　金：深圳市微纳光电子重点实验室开放课题资助课题

摘　　要：针对脉冲激光沉积(PLD)薄膜装置,建立了时间分辨等离子体发射光谱测量系统,在沉积类金刚石(DLC)薄膜时,通过对CII(426.7 nm)和CIII(229.7 nm)的发射谱测量发现,当脉冲激光轰击石墨靶材时,C发射谱强度均随时间变化,表现为由强变弱的时间变化过程,并且与靶材的表面状况有很强的相关性。实验过程中保持激光的脉冲频率和单脉冲能量不变,在石墨靶固定时,碳发射谱强度随时间呈快速下降趋势,当石墨靶旋转时,碳发射谱强度变化较为缓慢。实验发现,CIII和CII的发射谱强度的比值随时间逐渐增大。Time-resolved plasma emission spectrum measurement system is established for pulsed laser deposition（PLD） device.In diamond-like carbon film deposition,the intensity of CII（426.7 nm） and CIII（229.7 nm） emission is observed.The result is that the intensity decreases with deposition time,and depends strongly on target′s surface.Keeping pulse energy and frequency constant,when the target is held,the emission intensity decreases more quickly than that when the target is rotated.The ratio of CIII emission intensity to that of CII is found increasing with time.

关 键 词：光谱学 类金刚石薄膜 脉冲激光沉积 发射光谱 时间分辨测量 

分 类 号：TN249[电子电信—物理电子学] O433.1[机械工程—光学工程]