纳米三坐标测量机接触式测头预行程测量(英文)  

Measurement of Pre-Travel Distance of a Touch Probe for Nano-CMM

作　　者：程方[1] 范光照[1,2] 费业泰[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]台湾大学机械工程系,台北10617

出　　处：《纳米技术与精密工程》2010年第2期107-113,共7页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(50420120134)

摘　　要：提出了一种用于纳米三坐标测量机接触式测头预行程测量的方法.确定了预行程需侦测接触点和触发点两个关键点.为了对该高灵敏度的测头进行标定,整个实验系统需要3个基本条件:纳米级驱动器,高分辨率传感器和多级速度控制算法.本研究使用一种超声波马达HR4在同一平台上实现大行程粗略驱动以及微位移调整.位移测量使用光栅传感器LDGI(linear diffraction grating interferometer),其分辨率可达1nm.在测试过程中采用高速逼近和低速触发,使用"双触发"方式获得触发点位置.接触点位置的侦测使用开关电路.触发信号和位移信号由同一块数据采集卡同步采集.实验表明,使用该方法测量预行程,单方向重复性在±5nm以内.In this paper,a measurement method of pre-travel distance of a touch probe,intended for a nano-coordinate measuring machine（CMM）,was proposed.During the contact of the probe to the object,two key points are to be determined,namely the touched point and the triggered point,between which the pre-travel distance is defined.To calibrate this high-sensitive probe,the experimental system required three conditions：a nano-motion actuator,a high-resolution sensor and a multi-speed control method.An ultrasonic motor HR4 was used to generate both the long-stroke motion and the nano-position～ing on the same stage that carried the object.A linear diffraction grating interferometer（LDGI）provided the displacement feedback to the resolution of 1 nm.The multi-speed control was carried out by generating a high speed motion of the object for approaching to the probe and then a low speed motion for triggering the probe.A double-trigger method was proposed to ensure the precision of the triggered point.The touched point was sensed by means of a switching circuit.The probe triggered signal and the stage displacement signal were sampled simultaneously through a DAQ card.Experiments show that with the proposed method the unidirectional repeatability of the pre-travel distance is within ±5 nm.

关 键 词：纳米三坐标测量机 接触式测头 单方向重复性 预行程 二次触发 

分 类 号：TH721[机械工程—仪器科学与技术]