全玻璃太阳集热管烘烤排气工艺采用复合分子泵抽高真空  

HV evacuation for all-glass solar collector tubes by hybrid turbomolecular pumps in baking process

作　　者：王双[1] 苗建朋[1] 周旭[1] 池华敬[1] 陈革[1] 章其初[1] 

机构地区：[1]皇明太阳能集团镀膜研发中心,山东德州253000

出　　处：《真空》2010年第2期7-11,共5页Vacuum

摘　　要：采用复合分子泵替代油扩散泵进行全玻璃真空太阳集热管排气烘烤抽高真空试验。选用了三种型号分子泵,在集热管自动连续烘烤排气线上进行实验。经过约一年较长时间生产运行试验后,分子泵经受了190次以上的集热管管口破裂引起的大气冲击,没有损坏,抽真空性能无明显变化。采用分子泵烘烤排气工艺制备的集热管,按国标在温度350℃,48 h高温老化试验后,吸气剂镜面消失率约为5%,仅为国标规定值的10%。The hybrid turbomolecular pumps were used in the tests of the blending line as a baking-evacuating sytem for all-glass solar collector tubes. Three models of turbomolecular pumps were chosen instead of oil diffusion pumps, and each of them was mounted onto a trolley where 40 tubes are arranged in line for baking and evacuating tests. After the trial production over one year during which the molecular pumps suffered atmospheric shocks over 190 times due to glass tube cracking, those pumps were not damaged especially their evacuation performance basically remained unchanged. After the aging tests carried out for the solar collector tubes evacuated by molecular pumps at 350% for 48hr （according to the national standard）, the vanishing rate of getter on the mirror surface of the semi-sphere end of the tubes is around 5%, it＇s only 10% as specified by the national standard.

关 键 词：复合分子泵 太阳集热管 排气烘烤 大气冲击 真空性能 

分 类 号：TK519[动力工程及工程热物理—热能工程] TB43[一般工业技术]