静电力驱动的液滴数字传输芯片  

Droplets digitial-transporting chip driven by Electrostatic force

作　　者：皋华敏[1] 李铁[1] 许磊[1] 刘翔[1] 王翊[1] 周萍[1] 王跃林[1] 

机构地区：[1]传感技术联合国家重点实验室,微系统技术国家实验室,中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《功能材料与器件学报》2010年第2期131-136,共6页Journal of Functional Materials and Devices

基　　金：国家973项目"自上而下的微纳制造原理与方法"(课题编号:2006CB300403);863项目"基于自上而下工艺的高灵敏度硅纳米线生物传感器阵列"(项目编号:2007AA03Z308);国家自然基金委创新团队(编号:60721004)的资助

摘　　要：设计制作了一种基于静电力驱动的数字微流芯片。通过优化芯片的结构,采用硅为衬底,TiW/Au为微电极阵列,较薄的氮化硅和碳氟聚合物为介质层和疏水膜层,驱动电压大为降低。目前已成功实现了在30V的驱动电压下,对去离子水液滴的两维驱动,液滴移动速度可达96mm/s,同时也实现了对0.9%质量浓度NaCl溶液液滴的驱动。分析结果验证了液滴是在静电力的作用下实现移动。In this paper, an electrostatic force based digital microfluidic chip was designed and fabricated. Optimization of the chip structure by employing silicon wafer substrate, TiW/Au electrodes, thin silicon nitride dielectric layer and fuorocarbon polymer hydrophobic layer decreases the driving voltage dramatically. Deionized water droplets were successfully transported in two - dimension on this chip under only 30V with transported velocity of 96mm/s. 0.9% of sodium chloride mass fraction solution droplets were also successfully transported on this chip. Further investigation confirmed that electrostatic force is the driving force of the droplets.

关 键 词：数字微流芯片 静电力 液滴 

分 类 号：TH706[机械工程—仪器科学与技术] TH79[机械工程—精密仪器及机械]