一种基于QCM的液相混合微芯片的制作与应用  

Fabrication and application of a microchip based on QCM for solution mixing

作　　者：朱德峰[1,2] 许宝建[3] 程建功[1] 金庆辉[1] 赵建龙[1] 徐元森[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所,上海200050 [2]中国科学院研究生院,北京100039 [3]香港理工大学,医疗科技及资讯学系

出　　处：《功能材料与器件学报》2010年第2期153-157,共5页Journal of Functional Materials and Devices

基　　金：973项目2007CB714502;973项目2007CB93600;上海市科委项目No.0752nm021;上海市科委项目0852nm00400;上海市科委项目08110700200;上海市科委项目08540705800

摘　　要：生物定量检测中,生物样品是否均匀混合的研究意义重要。石英晶体微质量天平(QCM)因其振幅谐振机理,而具备优异的超声混合性能。本文结合微电子机械系统(MEMS)工艺,利用双面曝光、QCM预支撑和120℃长时间烘胶等改进方法,制备了尺寸可控、表面平整、结合紧密的SU-8芯片主体结构,利用聚二甲基硅氧烷(PDMS)封装获得完整的液相混合微芯片,最后利用罗丹明B荧光染料和SiO2纳米球对芯片的混合性能进行了表征。同时,本文提供了一种小体积、便捷、通用性好的液相混合微芯片的制备方法。Uniform mixing of biological samples is important for quantitative detection. QCM （Quartz Crystal Mierobalance） supports excellent ultrasonic ability for its amplitude resonance. An effective mi- eroehip based on QCM and SU - 8 for solution mixing was reported in this paper.. The SU - 8 main chip with controllable size, smooth surface and total binding, which was finally integrated with PDMS elastomer, was fabricated by improved MEMS technology, such as double -side exposure, pre -supporting of QCM and long time hard bake at 120℃. The mixing ability of this chip was characterized by Rhodamine B and SiO2 nano - spheres. This paper will contribute to fabrication of mixing chips which are small size, convenient to be used, effective and easy to be integrated with other functional microchips.

关 键 词：QCM SU-8 PDMS 混合 谐振 

分 类 号：TN305[电子电信—物理电子学]