软X-射线滤光片支撑镍网的设计及制作工艺研究  

Design and Fabrication Process of Electroformed Nickel Mesh for Soft X-ray Filter

作　　者：伍志军[1,2] 李加东[1,2] 张贵彦[1,2] 缪同群[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《压电与声光》2010年第2期195-197,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(40474069)

摘　　要：介绍了软X-射线滤光片支撑栅网的工作原理及其制作工艺,以金属镍为结构材料,采用了微机电系统(MEMS)技术中的电镀工艺及剥离工艺,讨论了制作工艺中的难点,最后成功制作了网面平整、网线匀称、表面光亮、应力小、厚度均匀的镍网,该镍网厚14μm,栅线间隔36.3μm,透过率80%。The theory and fabrication process of support mesh for soft X-ray filter is introduced. The mesh is fabricated with nickel, using the electroplating process and lift-off process in MEMS technology, and the fabrication difficulty is discussed in detail as well. The electroformed nickel mesh with smooth surface, low stress and coinci- dent thickness has been fabricated. The nickel mesh has the size of the thickness of 14 μm, line interval of 36.3 μm and the transmittance of 80 %.

关 键 词：X-射线光学 滤光片 电铸镍网 太阳X-射线成像望远镜 

分 类 号：O434.12[机械工程—光学工程]