压电微变形镜多路复用驱动技术的研究  

Study on Multiplexing Control of Piezoelectric Deformable Mirror

作　　者：马剑强[1] 许晓慧[2] 李保庆[1] 张晋弘[1] 褚家如[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230027 [2]江西省电力科学研究院,江西南昌330096

出　　处：《压电与声光》2010年第2期321-324,共4页Piezoelectrics & Acoustooptics

摘　　要：从电路模型上分析多路复用技术在压电微变形镜控制中的驱动特性,设计了基于双MOSFET开关的驱动电路,并对致动器的电压保持能力和抗干扰能力做了测试。实验和分析表明,一个高压运放驱动25个压电陶瓷(PZT)致动器时,工作频率可达400 Hz,致动器的变形控制精度在2%左右。与传统控制方法相比,该方法具有低功耗、低成本的优点,适用于自适应光学系统中多通道压电微变形镜的控制。The circuit model of multiplexing control of piezoelectric deformable mirror （DM） is investigated, and the double MOSFET-based driving circuit has been designed. The voltage holding and anti-jamming performances of the actuator have been tested. Experimental results show that the DM operation frequency could be as high as 400 Hz and the precision is about 2 % when one high voltage amplifier is used to drive 25 PZT actuators. Comparing with the traditional driving system, the new control system has several advantages such as low power consumption, low cost, etc. The control system can be applied to the drive multi-channel piezoelectric deformable mirror.

关 键 词：自适应光学 压电变形镜 多路复用技术 

分 类 号：TM282[一般工业技术—材料科学与工程]