双层气浮平台中气浮支承动力学参数设计的研究  

Dynamics Design of Aerostatic Bearings in Dual Gas-lubricated Stages

作　　者：叶燚玺[1] 陈学东[1] 罗欣[1] 

机构地区：[1]华中科技大学数字制造装备与技术国家重点实验室,武汉430074

出　　处：《中国机械工程》2010年第7期757-761,共5页China Mechanical Engineering

基　　金：国家重点基础研究发展计划资助项目(2009CB724205);国家自然科学基金资助项目(50605025)

摘　　要：针对双层气浮运动平台中气浮支承动力学参数设计问题,分析了气浮支承动力学参数的一般规律,提出了减小双层气浮平台同步误差的设计原则,并通过两种不同双层气浮平台动力学性能设计方案验证了所提出的设计原则。研究结果表明:选择和设计气足时需综合考虑多方面因素,包括气足承载力、刚度和阻尼参数的合理设计,设计时为了避免产生共振应遵循气足固有频率远离工作频率和平台结构频率的设计原则;当气浮平台对同步特性有需求时,双层气浮平台的气足固有频率应该相等,使双层平台具有相同的动力学性能,对干扰和驱动指令具有相同的响应特性,从而保证两者的同步精度。The problem how to design the dynamics parameters of aerostatic bearings was investi- gated. The general dynamics characteristics of aerostatic bearings were analyzed, and the dynamical design principles of aerostatic bearings for reducing the synchronization error of dual--stages were proposed. Then, two dynamics designs of aerostatic bearings of dual--stages were given to describe these principles. It is concluded that many factors need to be considered in the design of aerostatic bearings, including load--capacity, stiffness and damping etc, and the design principles that the aero- static bearings nature frequency should be away from working frequencies and structure frequencies so as to avoid resonance. When the dual--stages require the synchronization, the natural frequencies of aerostatic bearings should be equal to each other, so that the stages have the same dynamics perform- ance and the same response characteristics for driving instructions and interference to ensure the synchronization accuracy of dual-stages.

关 键 词：气浮支承 动力学 双层气浮平台 同步特性 

分 类 号：TH133.36[机械工程—机械制造及自动化]