基体预处理对氧化铍基金刚石膜性能的影响  

Influences of substrate pre-treatments on diamond/beryllia composite

作　　者：方梅[1,2] 余志明[1,2] 肖柱[1,3] 陈爽[1,2] 陈永勤[1,2] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中南大学教育部重点实验室功能薄膜研究室,长沙410083 [3]中南大学教育部重点实验室有色金属材料科学与工程实验室,长沙410083

出　　处：《材料科学与工艺》2010年第1期19-22,共4页Materials Science and Technology

摘　　要：通过改变氧化铍基体的预处理方法,研究了热丝化学气相沉积系统中金刚石薄膜与氧化铍基体的结合情况,及其对导热性能的影响.分别利用金相显微镜和扫描电镜观察薄膜的剥落程度和其表面形貌,利用激光热物性测试仪测量基体和金刚石膜/氧化铍复合体的热扩散系数,并计算其热导率.实验结果表明:水磨砂纸研磨和氢氟酸处理均能有效提高金刚石薄膜与基体的结合情况;氢氟酸处理时间10min时可得到致密连续、表面均匀的金刚石薄膜,此时复合体的热导率较原来的氧化铍基体可提高31.4%.Diamond thin films were deposited on beryllia substrates by hot-filament chemical vapor deposition to study the effect of substrate pre-treatment on the thermal properties. The surface details were investigated by metallographic microscope and scanning electronic microscope,while the thermal conductivity of BeO and diamond/BeO was detected by laser-diathermometer. The results show that both of the water-proof abrasive paper and HF pre-treating substrates can improve the continuity of diamond films. When the substrates are eroded by HF for 10 min,the compact and continuous diamond thin film with uniform surface can be obtained,and the thermal conductivity of the composite can be improved by 31. 4% compared with original BeO.

关 键 词：热丝化学气相沉积 金刚石薄膜 基体预处理 氧化铍 热导率 

分 类 号：TQ164[化学工程—高温制品工业]