激光束角漂移对双频激光直线度测量的影响  

The Influence of Laser Beam Angle Shift on the Measurement of Straightness with Double Frequency Laser

作　　者：于瀛洁[1] 张之江[1] 张善钟[1] 

机构地区：[1]哈尔滨工业大学精仪系

出　　处：《光电工程》1998年第4期55-61,72,共8页Opto-Electronic Engineering

摘　　要：利用惠更斯关于波面传播的理论，分析计算了双频激光渥拉斯顿棱镜直线度测量系统中激光束角漂移以及渥拉斯顿棱镜和双面反射镜倾角对测量精度的影响，得到了相应的结论。The influences of laser beam angle shift and the inclination angle of Wollaston prism and double side mirror in double frequency Wollaston prism straightness measuring system have been analyzed and calculated with Huygens principle inwave propagation in the paper,and the corresponding conclusions have been obtained.

关 键 词：双频激光干涉仪 直线度测量 激光束角漂移 

分 类 号：TH744.3[机械工程—光学工程]