双光束刚体三维位移测量术  

Three Dimension Displacement Measurement of a Rigid Body with Two Beams

作　　者：周剑[1] 赵宏[1] 陈文艺 任雅萍 谭玉山 

机构地区：[1]西安交通大学机械工程学院激光红外研究所

出　　处：《光电工程》1998年第4期68-72,共5页Opto-Electronic Engineering

摘　　要：提出测量刚体三维位移的一种新方法——双光束刚体三维位移测量术。该方法具有结构简单，性能可靠，集成化高，工业上易实现和价格便宜等优点。本文同时采用了一个小功率激光器为光源，一种新型的ＣＭＯＳ图象传感器为光电传感器件。最后通过相关分析法和数据拟合等图象处理技术，提高了整套系统的精度和分辨率。实验证实了该方法的测量范围为Ｘ、Ｙ维量程６ｍｍ，Ｚ维量程４ｍｍ，具有的测量精度优于±１５μｍ，以及较快的处理速度和较高的可靠性。A new method for measuring the 3 D displacement of a rigid body 3 D displacement measuring with two beams is proposed in the paper.The method has the advantages of simple structure,reliable properties,high integration,easier manufacturing and cheap cost.A low power laser is used as the light source and a novel CMOS image sensor is used as the photoelectric detecting device.The accuracy and resolution of the whole system have been improved by means of the image processing techniques such as correlative analysis method and data fitting.The measuring range of X,Y and Z is and 4mm,respectively.Its measuring accuracy is better than ±15μm.The measuring method has a faster processing speed and a higher reliability.

关 键 词：位移测量 三维测量 刚体 CMOS图象传感器 

分 类 号：TH822[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]