静电悬浮微陀螺的压膜阻尼特性  

Squeeze film damping of an electrostatically levitated micro-gyroscope

作　　者：应法明[1] 肖奇军[1] 崔峰[1] 陈文元[1] 张卫平[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细技术教育部重点实验室微米/纳米加工技术国家重点实验室,上海200030

出　　处：《中国惯性技术学报》2010年第2期219-224,共6页Journal of Chinese Inertial Technology

基　　金：国防预研基金项目(9140A09020706JW0314);教育部博士点基金新教师项目(200802481026)

摘　　要：空气阻尼对静电微陀螺系统的动态特性起着重要的影响。根据流体力学,构建了描述微陀螺内部气体压膜阻尼特性的线性Reynolds方程。将微陀螺内部气膜分成了13个分区,推导了转子在轴向振动、径向振动、径向摆动时的压膜阻尼系数。根据微陀螺的结构参数进行仿真,结果表明:轴向压膜阻尼系数对微陀螺支承系统的动态特性影响最大,而压膜阻尼系数与气体的温度,压强呈线性关系,与振动幅值呈抛物线型关系;在低频段系统呈现阻尼力,而到高频段,系统呈现弹性力。利用Simulink进行了微陀螺的系统建模,得出压膜阻尼系数Cz对PID参数的选取,尤其是Kd参数,起着重要作用,同时对系统的稳定性也有一定的影响。Air damping plays a critical role in the operation of electrostatical micro-gyroscope, and can provide stability to an inherently unstable system. In this paper, a linearized Reynolds equation is used to describe the squeeze film damping. The interior Chamber gas film is subdivided into thirteen zones, and the squeeze film damping coefficients when rotor make axis and radial vibration as well as radial swing. The simulations are made based on the structure parameters of microgyro, which show that the Z-axis squeeze film damping has a dominant effect on the gyroscope levitation, with gas damping coefficients proportional to the second power of the gas film thickness and linearly related to the gas temperature and the gas pressure. Air damping plays a critical role in the low frequency band, while elastic force plays an important role in the high frequency band. The resulting system-level model of the micro-gyroscope is implemented in Simulink, and it is deduced that the Z-axis squeeze film damping plays an important role in the selection of PID parameters, especially the Kd parameter and the stability of the system.

关 键 词：微陀螺 压膜阻尼 PID参数 稳定性 

分 类 号：U666.1[交通运输工程—船舶及航道工程]