锗晶体放电切割中钝化物形成机理及防范方法  

Formation Mechanism and Prevention of Passive Material during Electric Discharge Machining of Germanium Crystal

作　　者：胡燕伟[1] 刘志东[1] 田宗军[1] 邱明波[1] 汪炜[1] 毕勇[1] 黄因慧[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016

出　　处：《人工晶体学报》2010年第2期534-538,共5页Journal of Synthetic Crystals

基　　金：江苏省高技术研究计划资助项目(BG2007004)

摘　　要：在利用电火花线切割(WEDM)加工锗晶体时,会出现回路放电电流逐渐减少,并伴随着进电材料与锗晶体间有钝化物的生成,最终导致放电切割无法延续。本实验对放电切割状态进行了实验模拟并生成了钝化物,运用XRD技术对钝化物进行了分析,提出了一种防范钝化物产生的方法,最后采用这种方法利用改进的线切割机床对N型锗进行了放电切割,高效稳定地加工出了工件,从而验证了这种防钝化物产生方法的可行性,为进一步提高锗晶体的放电加工工艺指标奠定了基础。When germanium crystal is processed by wire electrical discharge machining（WEDM）,there would be a gradual reduction of the discharge loop current and passive material emerges between the contact material and the germanium crystal simultaneously,eventually the process break off.In this study,experiments simulated the state of the discharge cutting and generated passive material,which was analyzed passive material using XRD.Then a method was proposed to prevent passive material.Finally,in order to verify the feasibility of the method,N-type germanium was processed by this method based on improved WEDM machine tool,and high efficiency was obtained.That lays the foundation for further enhancing process indexes of germanium crystal based on EDM.

关 键 词：锗晶体 电火花线切割 钝化物 

分 类 号：O472[理学—半导体物理] TG662[理学—物理]