扩散硅数字化压力变送器补偿技术  

Compensation technology of diffused silicon digital pressure transducer

作　　者：崔卫 黄鹏军 李笃明 蔡亚平 

机构地区：[1]麦克传感器有限公司研发部 [2]麦克传感器有限公司

出　　处：《传感器世界》2010年第4期26-28,31,共4页Sensor World

摘　　要：详细介绍了扩散硅压力变送器的特点和现状,提出了对扩散硅压力变送器的数字补偿方案和补偿算法及实际测试结果。该技术提高了产品的整体性能,很好的解决了变送器零点温漂和灵敏度温漂的问题,并通过批量化的生产证实这种技术的正确性。The features and situations of diffused silicon pressure transducers are introduced in detail. The digital compensation solution and compensation algorithm are proposed And the actual testing results of the specified transducer are presented. This technology could improve the performances of the transducer, solve the problems of zero temperature drift and sensitivity drift. The technology practicability has been confirmed by mass production.

关 键 词：扩散硅压力传感器 压力变送器 数字补偿 补偿算法 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]