钽酸锂电光调制器中的共面波导电极结构分析  

The Bectrode Structure Analysis of CPW on LiTaO3 Electro-optical Modulator

作　　者：李建威[1,2] 姚和军[2] 徐楠[2] 李建[2] 

机构地区：[1]南开大学物理学院光子学中心,天津300071 [2]中国计量科学研究院,北京100013

出　　处：《计量学报》2010年第3期278-281,共4页Acta Metrologica Sinica

摘　　要：研究了以钽酸锂电光调制器为对象的共面波导（基准阻抗为50Ω）结构参数之间的关系问题。采用保角变换理论对电极结构、晶体厚度及特性参数进行数值分析，研究结果表明：电极加工宽度的微小变化会对特性阻抗产生较大的影响，中心导带宽度变化1μm，基准阻抗改变5．35％～5．78％；设计特性阻抗为50Ω的共面波导，对称结构具有较好的取值条件。The relationship of coplanar waveguide （CPW） structural parameters while the benchmark impedance of 50Ω CPW is studied, and the CPW of LiTaO3 electro-optical modulator is taken as an example. Conformal mapping theory is used to obtain the numerical relationship of electrode structure, thickness of the substrate and properties parameters, and the results show that the little change of electrode width would affect the CPW remarkably, 1 μm shift of the center conductor width will induce the change in the benchmark impedance ranging from 5.35% to 5.78%. For the design of the characteristic line impedance of 50 Ω CPW, symmetrical structure is a good choice.

关 键 词：计量学 共面波导 保角变换 50 Ω特性阻抗 钽酸锂电光调制器 

分 类 号：TB973[一般工业技术—计量学]