三自由度精密定位工作台的设计与运动学分析  

Design and Forward Kinematics of 3-DOF Precision Positioning Stage

作　　者：贾晓辉[1] 张大卫[1] 

机构地区：[1]天津大学机械工程学院,天津300072

出　　处：《天津大学学报》2010年第5期457-463,共7页Journal of Tianjin University(Science and Technology)

基　　金：国家自然科学基金资助项目(50705064);天津市自然科学基金资助项目(08JCYBJC01400)

摘　　要：针对精密柔性工作台多自由度高精度运动的需求,设计了一种采用柔性并联构型和压电陶瓷驱动的三自由度定位平台,通过建立的伪刚体模型进行运动学正解分析,并引入修正系数消除长杆柔性及柔性铰链中心偏移对工作台位移输出的影响,进一步提高了所建数学模型的精确度.利用有限元分析工具仿真了所设计的定位工作台的性能,确定了该工作台的修正系数矩阵,最终仿真试验验证了所建运动学模型的正确性.A 3-DOF piezo-driven compliant parallel positioning stage has been designed to meet the requirement of multi-dimensional nanometer level positioning of flexure-based precision mechanism.Forward kinematic analysis of the stage have been conducted based on the pseudo-rigid-body model established and modified coefficients have been introduced to eliminate the effect deformations of long links and drift of flexure hinge center on the stage displacement,so that the accuracy of the mathematical model has been raised.The kinematic performance of the positioning stage has been simulated with finite element analysis technique and its modified coefficient matrix has been determined.Simulation results have validated the established kinematic model,which can also be applied to other nano-operation precision positioning systems.

关 键 词：压印光刻 机构设计 运动学建模 

分 类 号：TH703[机械工程—仪器科学与技术]