基于科氏加速度的微陀螺  

A Review of Micro-gyroscope Based on Coriolis Acceleration

作　　者：刘凯[1] 张卫平[1] 陈文元[1] 李凯[1] 肖奇军[1] 马高印[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细加工教育部重点实验室微米/纳米加工国防实验室,上海200030

出　　处：《压电与声光》2010年第3期379-385,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60402003);国防预研基金资助项目(9140A09020706JW0314);2007年上海市人才发展基金资助项目(047)

摘　　要：首先介绍了科氏加速度产生基本原理和评价微陀螺的性能指标,然后主要从结构、工作原理、工艺、性能等方面对基于科氏加速度的一些典型微陀螺进行了分析和比较,同时对基于科氏加速度的微陀螺做出了评价,最后结合目前的研究探讨了基于科氏加速度的微陀螺的发展趋势。The basic principle of generating Coriolis acceleration and the specifications of evaluating the micro-gyroscope have been introduced in this paper.Some typical micro-gyroscopes based on Coriolis acceleration have been analysized and compared from the point of view of the structure,operating principle,process,performances and so on.Then the evaluation of the micro-gyroscope based on Coriolis acceleration has been made.Combining with the current research status,the future trends of micro-gyroscope based on Coriolis acceleraton has been discussed in the end of the paper.

关 键 词：微陀螺 科氏加速度 综述 趋势 

分 类 号：TN389[电子电信—物理电子学] TH712[机械工程—测试计量技术及仪器]