扫描隧道显微镜图像重建的研究  

A study on the image reconstruction for scanning tunneling microscopy

作　　者：刘安伟[1] 禹国强[1] 杨勇[1] 胡小唐[1] 

机构地区：[1]天津大学精仪学院

出　　处：《电子显微学报》1999年第1期115-118,共4页Journal of Chinese Electron Microscopy Society

基　　金：微米/纳米技术国防预研-微机理研究专项青年基金

摘　　要：在扫描隧道显微镜轮廓测量过程中，探针自身的几何形状会混入测量结果中，从而造成相应的测量误差。本文提出了根据对标准样品的测量结果，反算出探针的几何形状的算法，并应用于实测图像求解出探针的几何形状。在求得探针的几何形状后，文中推导了去除探针几何形状造成的误差，对扫描隧道显微镜图像进行重建的算法，并对实测样品进行了处理。结果表明上述算法可有效地减小探针自身形状造成的测量误差。For the accurate measurement of the mesoscopically rough surfaces by scanning tunneling microscopy, the distortion caused by the tip profile must be eliminated. The tip profile must be determined for this purpose. In this paper, a new technique for determining the STM tip profile is presented employing a STM calibration grating whose structure is known. The 2 D tip profile is obtained by this method. After the tip profile is determined, the STM image of Au film on SiO 2 wafer is reconstructed using a simple and straightforward formalism.

关 键 词：扫描隧道显微镜 图像重建 探针 STM 

分 类 号：TN16[电子电信—物理电子学]