Ti+注入H13钢的注入层研究  

Studies of the Titanium Ion Implanted H13 Steel

作　　者：李永良[1] 林文廉[2] 丁晓纪[2] 

机构地区：[1]北京师范大学分析测试中心,北京100875 [2]北京师范大学低能核物理研究所,北京100875

出　　处：《真空科学与技术》1999年第1期10-14,共5页Vacuum Science and Technology

基　　金："863"计划资助课题

摘　　要：Ti+ (10 0kV ,3× 10 17cm- 2 )注入H13钢 ,表面注入层的化学组成和微观结构发生了很大的变化。俄歇分析表明 ,注入元素Ti在钢表面层的剖面浓度分布呈近似高斯分布 ,在 4 0nm处Ti的浓度达到最大值。离子束真空碳化导致在钢的表面形成一层约 2 0nm的“富碳层”。透射电镜分析表明 ,表面层的微观形貌由注入前的板条状马氏体结构转变成注入后的微胞状结构。电子衍射则证实 ,表面注入层已出现非晶化 ,并且有约 5nm的TiC颗粒析出。摩擦磨损实验进一步表明 ,注入后钢的摩擦系数降低 70 % ,磨损率降低 98%。The depth profile of the surface layers and the surface microstructures of the Ti ion implanted H13 steel were studied with AES and TEM.The AES analysis has revealed that Ti concentration has a Gausian distribution with the peak being at 40 nm,and that 20 nm thick carbon rich layer results from vacuum carbonization.The TEM micrographs have showed that the surface microstructures have changed from the original martensite into the amorphous surface structures with precipitation of TiC grains,about 5 nm in size.The pin on disk tests indicated that the friction coefficient and the wear resistance decrease by 70% and 98%,respectively.

关 键 词：离子注入 摩擦 磨损 微观结构 钢 

分 类 号：TG161.8[金属学及工艺—热处理]