HTS台阶边缘结──特性和制作的实验研究  

CHARACTERISTICS AND MAKING OF HTS STEP EDGE JOSEPHSON JUNCTIONS

作　　者：陈珂[1,2] 杨涛[1,2] 吴陪均 陈烈[1,2] 

机构地区：[1]中国科学院物理研究所,超导国家重点实验室 [2]西北大学物理系,西北大学近代物理研究所

出　　处：《低温物理学报》1999年第1期25-29,共5页Low Temperature Physical Letters

摘　　要：本文用原子力显微镜（ＡＦＭ）对有不同伏安特性的台阶边缘结之台阶形貌进行了仔细测量．结果表明：台阶边缘晶界结特性受非平面衬底离子束刻蚀剖面细节的影响．文中对刻蚀剖面形貌的细节对结性能的影响进行了分析，并讨论了台阶结制作工艺重复性差。Abstract Step edges, on which the Josephson junctions have different current voltage characteristics, were studied carefully using Atomic Force Microscope (AFM). It shows that the characteristic of the step edge Josephson junction is affected by the cross section of the non planar substrate ion beametching. Such affection was analyzed. The reason of poor reproducibility of step edge Josephson junctions and the reason of the low production rate were discussed in this paper.

关 键 词：HTS 台阶边缘结 超导器件 离子束蚀刻 

分 类 号：O511.1[理学—低温物理]