在Ni片上制备YSZ/CeO_2阻挡层和YBCO超导膜  

DEPOSITION OF YSZ/CeO 2 BUFFER LAYERS AND YBCO FILMS ON NICKEL SUBSTRATES

作　　者：石东奇[1] 杨坚[1] 常世安[1] 袁冠森[1] 王素玉[2] 王家素[2] 雷延权[3] 

机构地区：[1]北京有色金属研究总院 [2]西南交通大学 [3]哈尔滨工业大学

出　　处：《低温物理学报》1999年第1期35-38,共4页Low Temperature Physical Letters

基　　金：国家超导技术研究开发中心资助项目;国家自然科学基金

摘　　要：本文用平面靶射频磁控溅射在具有双轴织构的Ｎｉ片上外延生长ＣｅＯ２和ＹＳＺ薄膜作为阻挡层，Ｘ射线衍射扫描分析表明ＣｅＯ２和ＹＳＺ薄膜具有强的ｃ轴织构和较好的平面内双轴织构．用中空柱状靶直流磁控溅射在阻挡层上制备ＹＢＣＯ超导薄膜．Abstract This paper reports the deposition of the epitaxial CeO 2 and YSZ thin films as the buffer layers on the biaxially textured Ni substrates by using the planar target re magnetron sputtering method. They had strong c axis texturing. The X ray diffraction  scan shown that the CeO 2 and YSZ flims had in plane biaxial texturing. YBCO films were deposited on YSZ/CeO 2/Ni by using inverted cylinder target DC magnetron sputtering system. The microwave surface resistance( R s ) of YBCO films on Ni was measured by the measurement system in 2cm wave band.

关 键 词：YBCO 超导膜 阻挡层 YSZ 二氧化铯 

分 类 号：TM262.05[一般工业技术—材料科学与工程]