Effect of thickness on structures of ultrathin diamond-like carbon films  

作　　者：CHE XiaoZhou CHEN LianHua MA HongTao FANG HongXin 

机构地区：[1]College of Materials Science & Engineering, South China University of Technology Guangzhou 510640, China [2]SAE, Dongguan 523087, China

出　　处：《Chinese Science Bulletin》2010年第18期1949-1951,共3页

摘　　要：Diamond-like carbon(DLC) films with different thickness were deposited by filtered cathode vacuum arc(FCVA).Vis-Raman and spectroscopic ellipsometry were employed to analyze the structure of DLC films.The wavelength of Vis-Raman is 514.5 nm.Experimental results show that structures of DLC films are affected by film thicknesses.When the film thickness increases from 2 to 30 nm,the G-peak position(G-pos) shifts to higher wavelength,the intensity ratio ID/IG and the extinction coefficient Ks decrease.It is indicated that the content of sp3 bond increases with film thickness.However,when the film thickness increases from 30 nm to 50 nm,ID/IG and Ks increase.The content of sp3 bonds decreases with film thickness.Diamond-like carbon （DLC） films with different thickness were deposited by filtered cathode vacuum arc （FCVA）. Vis-Raman and spectroscopic ellipsometry were employed to analyze the structure of DLC films. The wavelength of Vis-Raman is 514.5 nm. Experimental results show that structures of DLC films are affected by film thicknesses. When the film thickness increases from 2 to 30 nm, the G-peak position （G-pos） shifts to higher wavelengthl the intensity ratio 1D/lc and the extinction coefficient Ks decrease. It is indicated that the content of sp3 bond increases with film thickness. However, when the film thickness increases from 30 nm to 50 nm, lrJlc, and Ks increase. The content of sp3 bonds decreases with film thickness.

关 键 词：类金刚石碳薄膜 薄膜厚度 结构 过滤阴极真空电弧 类金刚石薄膜 超薄 拉曼光谱 FCVA 

分 类 号：O484.1[理学—固体物理]