低氟溶胶-凝胶法制备Φ76.2mm YBCO薄膜  

Preparation of Φ76.2mm Thick YBCO Films by Low-Fluorine Sol-Gel Process

作　　者：雷黎[1] 赵高扬[1] 刘晓梅[1] 赵娟娟[1] 

机构地区：[1]西安理工大学,陕西西安710048

出　　处：《稀有金属材料与工程》2010年第6期1116-1120,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金资助(50772088);西安应用材料创新基金(XA-AM-200611)

摘　　要：采用低氟溶胶-凝胶法在Φ76.2mm的LaAlO3(LAO)单晶衬底上制备YBCO薄膜,然后对Φ76.2mm的YBCO薄膜样品的微观结构、膜厚及超导性能进行均匀性测试分析。结果表明:所制备的薄膜厚度均匀并具有较好的c轴外延生长取向和均匀的超导电性能。YBCO film was deposited on LaAlO3 （LAO） single crystal substrate of Φ76.2 mm using low-fluorine sol-gel process. The uniformity of microstructure, thickness and superconducting properties of the Φ76.2 mm YBCO film were analyzed. The results show that the whole film has uniform thickness and exhibits good c-axis epitaxial growth orientation and excellent uniform superconducting properties

关 键 词：低氟溶胶-凝胶法 YBCO薄膜 大面积 外延生长 

分 类 号：O484.1[理学—固体物理]