亚波长结构纳米孔的近场光学测试  

Near-field optical test of the nanohole with subwavelength structure

作　　者：李海军[1,2,3] 时文华[1] 查强[1] 王媛[1] 王逸群[1] 邢政[1] 张宝顺[1] 

机构地区：[1]中国科学院苏州纳米技术与纳米仿生学研究所,江苏苏州215125 [2]中国科学院半导体研究所,北京100083 [3]中国科学院研究生院,北京100049

出　　处：《光电子．激光》2010年第7期963-965,共3页Journal of Optoelectronics·Laser

基　　金：苏州市科技发展资助项目(ZXG0712)

摘　　要：利用微纳加工工艺制作了亚波长结构纳米孔,应用近场光学显微镜(NFOM)对样品进行了近场光学性质的测试,获得了样品的近场光强分布,测得其近场光斑直径约为120 nm,测试结果证明了环形周期性结构对中心纳米孔的增透和聚焦作用,为环形亚波长结构的纳米孔应用奠定了基础。Near-field optical microscope is an important tool for the near-field optical test of micro-nano structure optical device.The scanning near-field optical probe is applied to test the near-field optical properties of nanohole.The near field intensity distribution of the nanohole is obtained and the near-field spot diameter is measured as about 120 nm.Test results show that the annular structure plays a positive role in focusing energy and enhancing transmission.This research may be the foundation for the practical applications of the nanohole with annular subwavelength structure.

关 键 词：近场光学显微镜(NFOM) 纳米孔 环形结构 近场光斑 

分 类 号：O439[机械工程—光学工程]