基于激光视觉的石英摆片厚度精密测量方法  

Accurate measurement method for the thickness of quartz pendulous reed based on laser vision

作　　者：佟庆彬[1] 张晓冬[1] 丁振良[2] 袁峰[2] 

机构地区：[1]北京交通大学电气工程学院,北京100044 [2]哈尔滨工业大学电气工程及自动化学院,哈尔滨150001

出　　处：《仪器仪表学报》2010年第6期1358-1363,共6页Chinese Journal of Scientific Instrument

摘　　要：石英摆片厚度的检测能够提供产品生产过程中的重要信息,通过实时检测石英摆片的厚度,可以生产出高质量的产品,并能够识别和排除有缺陷的产品。为了提高石英摆片厚度参数检测的精度和效率,提出了一种利用激光视觉技术进行石英摆片厚度测量的非接触测量方法。该方法根据斯涅尔的基本光学定律,通过视觉测量系统获取激光光斑的图像;利用改进的Zern ike矩边缘定位算法及优化的激光光斑中心定位算法计算石英摆片的厚度。设计了半导体激光器恒功率驱动控制系统和激光光束准直系统,分析了激光入射角角度的选取原则。实验结果表明:该方法稳定性好,测量精度高,可以实现石英摆片厚度的非接触精密测量。The inspection of thickness provides important information about the production process of quartz pendulous reed（QPR） manufacture.Through real-time detection of quartz pendulum reed thickness,high-quality products can be produced,and defective products can be identified and removed.In order to improve detection accuracy and efficiency,a novel non-contact measurement method for measuring the thickness of QPR based on laser vision is presented in this paper,which can realize automatic measurement.Based on the fundamental optics law of Snell,the image of a laser spot is obtained by a laser vision system.An improved edge detection algorithm is proposed to locate the subpixel edge of the laser spot,and the calculation method of the laser spot center is presented.A constant power drive control system of the laser diode and a laser beam alignment system are designed and optimized;and the selection criterion of the laser incident angle is analyzed.Experimental results show that the proposed method has good stability and high measurement accuracy,which can achieve precise non-contact measurement of QPR thickness.

关 键 词：激光视觉 石英摆片 厚度测量 斯涅尔定律 亚像素边缘定位 ZERNIKE矩 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]