超精密平面磨削 0.01μm 微量进给装置的实验研究  

Laboratory Research on 0.01μm Micro feed Device for Ultra precision Face Grinding

作　　者：刘东[1,2] 殷国富[1,2] 吴明根[1,2] 

机构地区：[1]四川联合大学 [2]中国航空精密机械研究所

出　　处：《中国机械工程》1999年第1期21-23,共3页China Mechanical Engineering

摘　　要：微量进给可满足可延性磨削的要求，微量进给装置采用压电陶瓷作为控制元件，通过调节空气轴承供气压力，实现超精密平面磨削０．０１μｍ的微进给量，实验表明该装置可用于磨床导轨误差的缓进给补偿控制中。Micro feed can meet the need of ductil grinding. This paper presents a developed device which can get feed of 0.01μm when the air bearing pressure is adjusted by the piezoelectic ceramic. Experiments show that this device can be used in compensation control for slideway error of face grinding machine in a slow feeding speed.

关 键 词：超精密平面磨削 微量进给装置 磨床 

分 类 号：TG580.23[金属学及工艺—金属切削加工及机床] TG580.64