锯齿形硅基微通道内流动与换热特性实验  

Experimental study of flow and heat transfer characteristics in silicon-based corrugated microchannels

作　　者：唐慧敏[1] 吴慧英[1] 吴信宇[1] 

机构地区：[1]上海交通大学机械与动力工程学院,上海200240

出　　处：《航空动力学报》2010年第6期1264-1270,共7页Journal of Aerospace Power

基　　金：国家杰出青年科学基金(50925624);教育部新世纪优秀人才项目(NCET-06-0406);上海市教委科研创新项目(08ZZ10);上海市曙光计划跟踪项目(08GG05)

摘　　要：采用微机电系统(MEMS)工艺在硅片上制作锯齿形微通道,并对其内部流动和换热特性进行了实验研究,同时与相同高宽比和当量直径的平直微通道进行了对比,讨论了锯齿形硅微通道强化换热的机理.研究表明:锯齿形微通道内流动摩擦常数fRe和换热努塞尔数Nu较平直微通道均有明显提高,且提高幅度随雷诺数Re增加而增加;相同泵功条件下锯齿形微通道换热热阻显著下降.Silicon-based corrugated microchannels used for heat transfer enhancement were fabricated by micro-electro-mechanical-system technology for the first time.The flow and heat transfer characteristics of the deionized water through these corrugated microchannels were studied experimentally,and comparisons were performed between corrugated microchannels and straight microchannels with the same aspect ratio（height-to-width ratio） and hydraulic diameter.Experimental results show that,both flow friction and Nusselt number in corrugated microchannels increase considerably than those in straight microchannels,and this increase becomes more obvious with the increasing Reynolds number.Under the same pumping power,using corrugated microchannels instead of straight microchannels causes the reduction of thermal resistance.The heat transfer enhancement mechanism of corrugated microchannels was also discussed.

关 键 词：锯齿形 硅基微通道 对流换热 强化换热 流动阻力 

分 类 号：TK124[动力工程及工程热物理—工程热物理]