基于MCGS和MATLAB的薄膜厚度控制系统仿真  

Simulation of Film Thickness Controlling System Based on MCGS and MATLAB

作　　者：李杨帆[1] 蒋品群[1] 李廷会[1] 隆媛媛[1] 

机构地区：[1]广西师范大学电子工程学院,广西桂林541004

出　　处：《广西师范大学学报（自然科学版）》2010年第2期18-21,共4页Journal of Guangxi Normal University:Natural Science Edition

基　　金：国家自然科学基金资助项目(10947011);广西教育厅科研项目(200608MS133);广西高校重点建设实验室项目(200912)

摘　　要：以MCGS组态软件和MATLAB为平台,设计和仿真了一个薄膜厚度控制系统。MCGS完成硬件接口的设置、数据的实时采集、人机对话、以动画的方式显示控制系统的运行情况,MATLAB完成PID参数的自动整定,并利用动态数据交换(DDE)技术建立两者间的通讯。仿真结果表明,本控制系统超调量小、响应速度快、自适应能力强,而且操作方便、显示直观,具有较大的应用价值。A film thickness controlling system is designed and simulated based on MCGS configuration software as well as MATLAB. MCGS is used to accomplish setting hardware interface,real-time data collecting, man-machine dialogue and animated displaying the running status of controlling system. MATLAB is used to auto-tuning PID algorithms ,and DDE communication protocol is used to realize data exchange between MCGS and MATLAB. The simulating result indicates that the control system is characterized by small overshot ,rapid response ,swift self-adaptability ,easy operation and direct display and has great application value.

关 键 词：薄膜厚度控制 MCGS MATLAB BP神经网络 DDE协议 

分 类 号：TP273.2[自动化与计算机技术—检测技术与自动化装置]