基于MEMS技术微电容压力传感器转换电路的设计  

A circuit design of small capacity pressure sensor based on MEMS

作　　者：何立志[1] 刘群[2] 

机构地区：[1]黑龙江大学物理科学与技术学院,哈尔滨150080 [2]哈尔滨工业大学电气工程及自动化学院,哈尔滨150001

出　　处：《黑龙江大学自然科学学报》2010年第3期407-410,416,共5页Journal of Natural Science of Heilongjiang University

基　　金：黑龙江省自然科学基金资助项目(A200805)

摘　　要：在交流激励、电容-电压转换测量方案中,针对测量信号微弱、干扰、温漂大的问题,从测量原理、误差产生、抗杂散性等方面进行了分析,对转换电路中的运算放大器引入了负反馈,并对反馈元件取值进行了研究和实验,得出了实验仿真与调试结果,并给出该电路的误差分析与校正曲线。仿真结果显示,该电路在抗杂散性、抗温漂、提高分辨率和信噪比方面满足设计要求。In the plan of ac drive and C-V transformation metering circuit, the major problem of measuring signal weak, large disturbs and temperature floating were analysised by the metering principle, produced of the error, the anti-stray and so on, a feedback was introduced to the operational amplifier, and the value of Circuit element were researched in detaileds, the experiment simulation and the debugging result has been obtained, and the result of circuit＇s error analysis and the calibration curve were obtained, the simulation result demonstrated that this circuit satisfies the design requirements in anti-stray, anti-temperature floated, raising resolution and signal-noise ratio.

关 键 词：传感器 微电容 交流激励 电容-电压转换 负反馈 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]