基于激光超声表面波检测的瓦斯检测研究  

Study on gas detection based on laser ultrasound surface wave detection

作　　者：付华[1] 乔德浩[1] 池继辉[1] 

机构地区：[1]辽宁工程技术大学电气与控制工程学院,辽宁葫芦岛125105

出　　处：《传感器与微系统》2010年第7期50-52,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50874059);辽宁省优秀人才计划基金资助项目(2007R24);教育部博士点基金资助项目(200801470003);辽宁省科技攻关计划资助项目(2006220019)

摘　　要：利用SnO2/Pt气敏薄膜对瓦斯气体的选择性吸附作用将引起声表面波在其表面的传播速度发生相应改变的性质,并结合激光超声检测技术,提出了一种新的瓦斯检测方法。采用激光在覆有选择性气体吸附薄膜的抛光铝材表面激发出声表面波,用单芯光纤耦合的反射式光束偏转法对所激发声表面波信息进行采集,进而通过合理的算法可以准确检测出环境中瓦斯气体的体积分数。为瓦斯监测方法提供了一种新途径。The property of air sensitive of SnO2/Pt film that gas adsorption effect will cause the velocity corresponding change of surface acoustic wave on the film surface. Combined with laser ultrasound detection technology,a new kind of gas sensor detection methods is put forward. By using the laser cladding selective adsorption film on the surface of polishing aluminum, to inspire acoustic surface wave and by using single fiber coupling beams of reflective deflection method, the stimulated surface acoustic wave information is acquired. By using reasonable algorithm, the gas volume fraction in the environment can be accurately detected. It provides a new way for gas monitoring method.

关 键 词：瓦斯传感器 声表面波 激光超声检测 气敏薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]