具有抑振功能的超精密微动平台  

Ultra-precision micro-displacement worktable with vibration suppression function

作　　者：黄金永[1] 邓劲莲[1] 魏燕定[2] 

机构地区：[1]浙江机电职业技术学院机电工程系,浙江杭州310053 [2]浙江大学机械工程学院,浙江杭州310027

出　　处：《机械设计》2010年第7期40-42,共3页Journal of Machine Design

基　　金：国家自然科学基金资助项目(50005020);863青年基金资助项目(863-2-2-11-3)

摘　　要：针对目前日益增多的超精密仪器仪表,一般给其提供良好工作环境的工作平台只能消除外界对其的振动干扰,对于仪器仪表自身各种执行机构动作所产生的干扰却无能为力。文中研究的微动平台不仅具有良好的定位功能,同时运用反定位原理,采用闭环PID控制算法,可以有效抑制设备自身产生的振动干扰,从而更全面地获得精密设备所需要的良好工作环境,实现真正意义上的超精密。Aiming at the increasing number of ultra-precision instruments, the worktable with work environment is commonly provided, this can only reduce vibrating interference from outside, but it is impossible to eliminate the interference caused by the action of various actuators with the instruments themselves. The micro-displacement worktable in this paper not only has a good positional function, but also can effectively suppress vibrating interference occurred in the equipment itself by applying the anti-position principle and adopting and closed-loop PID control algorithm, much more comprehensively obtaining the good work environment required by the precision equipment, making them to be ultra-precision in the real meaning.

关 键 词：定位 抑振 超精密 微动平台 

分 类 号：TD302[矿业工程—矿井建设]