一种评价硅微陀螺性能的电路分析方法  

One Circuit Analysis Method Used to Evaluate the Silicon-Microgyroscope Performance

作　　者：陈志华[1] 满海鸥[1] 肖定邦[1] 吴学忠[1] 侯占强[1] 陶溢[1,2] 

机构地区：[1]国防科学技术大学机电工程与自动化学院,长沙410073 [2]武汉军械士官学校,武汉430075

出　　处：《传感技术学报》2010年第7期931-934,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(50375154)

摘　　要：硅微机械陀螺批量生产后,传统的微陀螺测试方法耗费时间比较长,需要专用设备,测试系统比较复杂,工作量很大。基于双正弦载波调制的测控电路,经过大量的电路调试工作,首次利用电路分析方法,提出了三种评价硅微陀螺性能的指标。运用此评价指标,对五个硅微陀螺进行了性能评价,性能由高到低依次是G05、G04、G03、G02、G01,并用零偏稳定性指标对G05、G01进行了验证,G05零偏稳定性67°/h,G01零偏稳定性104°/h。结果表明,电路分析方法可以快速评价硅微陀螺性能,效率高,准确率高。最后,运用电路分析方法进一步优化了微陀螺的结构设计以及改进了相关的制造工艺。After batch manufacturing process of silicon-microgyroscope, conventional microgyroscope test method consumes more time as well as needs special instruments and equipments, at the same time the test system is of great complexity with a mass of workload. This paper bases on read-out circuit using double modulating sine waves, carrying out large numbers of work, and put forward to three indices to evaluate the silicon-microgyroscope performance by use of circuit analysis method for the first time. By three evaluation indices, the performance of five silicon-microgyroscopes from high to low is orderly G05, G04, G03, G02, G01.Father more, take bias offset stability to make sure G05, G01, the zero bias stability of G05 is 67°/h as well as G01 is 104°/h. The experimental results show that circuit analysis method can evaluate the performance of silicon-microgyroscope rapidly with high efficiency and exactness. Further more, make the structure design of microgyroscope optimized and improve related fabrication process by circuit analysis method.

关 键 词：硅微陀螺 双正弦载波 零偏稳定性 电路分析 

分 类 号：TN492[电子电信—微电子学与固体电子学]