2μs低损耗声体波微波延迟线  

2μs Low Loss BAW Microwave Delay Line

作　　者：朱昌安[1] 郑泽渔[1] 李世红[1] 汤劲松[1] 周勇[1] 王宗富[1] 米佳[1] 刘玲[1] 

机构地区：[1]四川压电与声光技术研究所,重庆400060

出　　处：《压电与声光》2010年第4期521-523,共3页Piezoelectrics & Acoustooptics

摘　　要：通过优化换能器拓扑结构,探索长延时传声介质的双面光刻及探针提取S参数进行网络匹配等技术,改进了声体波微波延迟线换能器设计及制作工艺。研制出中心频率为4.3 GHz,带宽为200 MHz,延迟时间为1.999 7μs,插入损耗仅26 dB,直通抑制45 dB,3次渡越抑制42 dB的声体波微波延迟线。By optimizing design of transducer topology,using double-faced lithography process and designing the matching network based on the S-parameter of the transducer,the 1.999 7 μs bulk acoustic wave microwave delay line operated with the center frequency of 4.3 GHz and the bandwidth of 200 MHz was developed.The delay line had the insertion loss of 26 dB,the feed through suppression of 45 dB and the transmitting suppression of 42 dB.

关 键 词：低损耗 声体波 延迟线 

分 类 号：TN65[电子电信—电路与系统]