竖式高精度压电尺蠖式位移致动器  

A Precision Inchworm-type Piezoelectric Actuator with Vertical Movement,Simple Structure and Easy Assembly Feature

作　　者：王丽娜[1,2] 刘俊标[1] 郭少鹏[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院研究生院,北京100049

出　　处：《压电与声光》2010年第4期601-603,607,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50607018);国家重点基础研究发展计划基金资助项目(2006CB932501)

摘　　要：介绍了一种结构简单,易装配的竖式高精度压电尺蠖式位移致动器,阐述了致动器的工作原理和结构形式。致动器采用叠堆式压电陶瓷作为驱动,利用柔性铰链作为箝位,能可靠地实现光轴的双向运动。位移分辨率可达到纳米级别,步距可在纳米级至微米级间任意选择。A high-precision inchwoem-type piezoelectric actuatour with vertical movement,simple structure and easy-assembly has been introdcued in this paper.The operating principle and mechanical design have been presented.Driven by the laminated PZT and utilizing the flexible hinge as clamp,this actuator could move back and forth freely.The step could be adjusted from several nanometers to microns and the displacement resolution could be up to nano-scale.The advantages could be featured with simple structure,easy assembly,convenient operation and control.

关 键 词：压电尺蠖式位移致动器 竖向运动 柔性铰链 纳米定位 

分 类 号：TN384[电子电信—物理电子学]