多线阵半导体激光器的单光纤耦合输出  

Single Fiber Coupling of Multi-Linear-Array-Diode-Lasers

作　　者：高欣[1] 薄报学[1] 乔忠良[1] 芦鹏[1] 王玉霞[1] 李辉[1] 曲轶[1] 

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,长春130022

出　　处：《光子学报》2010年第7期1229-1234,共6页Acta Photonica Sinica

基　　金：国家自然科学基金(60474026;60477010)资助

摘　　要：设计并研制了一种多线阵半导体激光器的高亮度光纤耦合输出模块.激光器芯片采用了分子束外延方法生长的宽波导、双量子阱结构AlGaAs/GaAs激光器外延材料,激光器模块采用6只准直的线阵半导体激光器,器件腔长为1.2mm,单个发光单元宽度为100μm,发光单元周期为500μm,单线阵器件包括19个发光单元,单线阵器件的连续输出功率为50W,每只单线阵器件的准直输出光束经过空间合束后再通过光束对称化变换实现了多线阵器件输出的高光束质量功率合成,采用平凸柱透镜实现了合束光束与400μm芯径、数值孔径0.22石英光纤的高效率耦合,整体耦合效率达到65%,最大耦合输出功率达到195W,光纤端面功率密度达到1.55×105W/cm2.High brightness fiber coupling laser module with multi-linear-laser-diode-arrays is designed and fabricated.The laser diode chips are fabricated with a broad waveguide and double quantum well structure by molecular beam epitaxy method.The module contains 6 collimated single linear-laser-diode-arrays which can operate to CW 50 W output power with single emission width of 100 μm,pitch of 500 μm,cavity length of 1 200 μm and 19 emitters per bar.Beam output with high beam quality is obtained by space beam combination and beam shaping afterwards,the combined 6-beam output is focused into a 400 μm-core quartz fiber with NA0.22 by a set of flat-convex cylindrical lens.Finally,a maximum fiber end output power of 195 W with power density of 1.55×105 W/cm2 is achieved,and the total coupling efficiency is as high as 65%.

关 键 词：线阵半导体激光器 光纤耦合 空间合束 光束变换 

分 类 号：TN248.4[电子电信—物理电子学]